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Itsumi, Manabu and Itsumi, M. Sio2 in Si Microdevices
SPRINGER VERLAG GMBH
Brand new print-on-demand hardback book produced in the US and delivered from our US warehouse in 7-10 days. Check out our low worldwide delivery costs! Please note: we only take orders through ABE - NOT DIRECT!
ISBN-13: 9783540433392
Erscheinungsjahr: 2007
Preis: 132,46 EUR
Versandkosten: zzgl. ca. 4,74 EUR
Lieferzeit: 7 - 10 Tage ins EmpfängerlandAnbieter: Books2Anywhere.com
Standort: Fairford, GLO, United Kingdom
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Itsumi, Manabu and Itsumi, M. Sio2 in Si Microdevices
SPRINGER VERLAG GMBH
New print-on-demand hardback book produced in the US and delivered from our US warehouse in 10-14 days
ISBN-13: 9783540433392
Erscheinungsjahr: 2003
Preis: 118,00 EUR
Versandkosten: zzgl. ca. 7,37 EUR
Lieferzeit: 10 - 14 Tage ins EmpfängerlandAnbieter: Paperbackshop-US
Standort: Elk Grove Village, IL, U.S.A.
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Itsumi, M. Sio 2 in Si Microdevices
Brand New Book. Devoted to your 100% satisfaction. Money back guaranteed. Over 10 million happy customers.
ISBN-10: 3540433392
Preis: 118,25 EUR
Versandkosten: zzgl. ca. 9,31 EUR
Lieferzeit: 21 - 36 Tage ins EmpfängerlandAnbieter: SuperBookDeals.com
Standort: South Bend, IN, U.S.A.
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M. Itsumi, Manabu Itsumi Sio2 in Si Microdevices
Springer
Electronic systems and digital computers are an indispensable element of modern multimedia technologies and the Internet society. But their explosive advance would not have been possible without the extraordinary progress in VLSI technology using high-quality SiO2. This volume addresses the thin gate oxides involved in the individual processes in fabrication, e.g. the growth, cleaning and thermal oxidation of silicon, metal interconnect formation, and photolithography. It describes new methods for observing defects in SiO2 as well as novel approaches to eliminating such defects. The book will be a valuable resource for all materials scientists and engineers seeking to further advance the quality of silicon microdevices. 344 pages.
ISBN-10: 3540433392
Einband: Gebundene Ausgabe (Hardcover)
Erscheinungsjahr: 2003
Preis: 148,21 EUR
Versandkosten: zzgl. ca. 15,59 EUR
Lieferzeit: 7 - 14 Tage ins EmpfängerlandAnbieter: ABC Books
Standort: Lowfield Heath, CRAWL, United Kingdom
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M. Itsumi, Manabu Itsumi Sio2 in Si Microdevices
Springer
Electronic systems and digital computers are an indispensable element of modern multimedia technologies and the Internet society. But their explosive advance would not have been possible without the extraordinary progress in VLSI technology using high-quality SiO2. This volume addresses the thin gate oxides involved in the individual processes in fabrication, e.g. the growth, cleaning and thermal oxidation of silicon, metal interconnect formation, and photolithography. It describes new methods for observing defects in SiO2 as well as novel approaches to eliminating such defects. The book will be a valuable resource for all materials scientists and engineers seeking to further advance the quality of silicon microdevices. 344 pages.
ISBN-10: 3540433392
Einband: Gebundene Ausgabe (Hardcover)
Erscheinungsjahr: 2003
Preis: 161,67 EUR
Versandkosten: zzgl. ca. 21,72 EUR
Lieferzeit: 25 - 45 Tage ins EmpfängerlandAnbieter: AussieBookSeller
Standort: Artarmon, NSW, Australia
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Itsumi, Manabu , Author Itsumi, M. Author Sio2 in Si Microdevices
Springer
(00344 pages) This book is printed on demand, please allow up to 10 days extra for delivery. {Publisher's Publication Date = 2007-09-01 00:00:00} [ships from USA takes 8-14 days to Europe] illustrated Lang=English accessory:NO ACCESSORY (Hardcover )
ISBN-10: 3540433392
Einband: Gebundene Ausgabe (Hardcover)
Erscheinungsjahr: 2010
Preis: 135,63 EUR
Versandkosten: zzgl. ca. 11,97 EUR
Lieferzeit: 14 - 56 Tage ins EmpfängerlandAnbieter: Stratford Books
Standort: United Kingdom, ., United Kingdom
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Itsumi, M. SiO2 in Si Microdevices.
Berlin, Springer, 2002.
Springer Series in Materials Science. 328 figs., 25 tab., XIII, 322 p. Hard cover
ISBN-13: 9783540433392
Einband: Gebundene Ausgabe (Hardcover)
Erscheinungsjahr: 2002
Preis: 40,00 EUR
Versandkosten: zzgl. ca. 13,00 EUR
Lieferzeit: 15 - 45 Tage ins EmpfängerlandAnbieter: Antiquariat im Hufelandhaus GmbH
Standort: Berlin, B, Germany
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